|Drive system||Ironless linear motor|
|Resolution of the measuring system||100 – 1 nm|
|Repeatability (mean & peak-to-peak)||Depending on resolution and controller|
|Stroke XY with aperture||200 – 300 mm|
|Stroke XY without aperture||50 – 300 mm|
|Max. velocity||0,3 m/s|
|Max. acceleration||5 m/s²|
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